SOI技术及其最新进展

广东工业大学学报 ›› 1999, Vol. 16 ›› Issue (3): 89-94.

SOI技术及其最新进展

广东农工商管理学院计算机系!广东广州510507；广东工业大学数理系!广东广州510090；

出版日期:1999-10-02 发布日期:1999-10-02

SOI Technology and the Latest Develop ment in It

( 1 . Guangdong Agricultural, Industrialand Com mercial Administration College, Guangzhou 510507 , China ;2 . Dept.of Mathematics and Physics, G D U T, Guangzhou 510090 , China)

Online:1999-10-02 Published:1999-10-02

摘要/Abstract

摘要： 介绍了近年来实现三维集成电路中的关键技术——— ＳＯＩ技术的各类方法，重点讨论了各种ＳＯＩ技术的最新进展．

罗南林；吴福根； . SOI技术及其最新进展[J]. 广东工业大学学报, 1999, 16(3): 89-94.

L U O Nan lin1 , W U Fu gen2. SOI Technology and the Latest Develop ment in It[J]. Journal of Guangdong University of Technology, 1999, 16(3): 89-94.

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