Journal of Guangdong University of Technology ›› 2024, Vol. 41 ›› Issue (01): 119-126.doi: 10.12052/gdutxb.220158

• Comprehensive Studies • Previous Articles     Next Articles

Theoretical Study on Valence Band Structure of Strained Wurtzite GaN/AlN Quantum Well with Different Crystal Orientations

Liu Ya-qun1, Li Xi-yue2, Zhang Gary2   

  1. 1. School of Information Engineering, Guangdong University of Technology, Guangzhou 510006;
    2. School of Integrated Circuits, Guangdong University of Technology, Guangzhou 510006
  • Received:2022-10-16 Online:2024-01-25 Published:2023-08-08

Abstract: In order to deeply understand the physical properties of strained heterojunction quantum well structures and improve the design of wide-bandgap nitride semiconductor devices, in this paper, based on the six-band stress-dependent k·p Hamiltonian and the self-consistent Schrodinger-Poisson equation, the valence subband model of wurtzite GaN/AlN quantum well with polar (0001) , semi-polar ($10\bar 12 $) and non-polar ($10\bar 10 $) orientations under field confinement was established. The subband energy dispersion relations between GaN/AlN quantum well with different crystal orientations under biaxial and uniaxial stresses were also given. According to the influence of stress on the valence band structure of quantum well, the microcosmic physical relationship between stress and hole effective mass was studied comprehensively. The results show that the valence band structure heavily depends on the modification in crystal orientation. The biaxial stress has little effect on the improvement of effective mass. However, uniaxial compressive stress can obtain more holes in the region of low effective mass by reducing the energy in the vertical channel direction, such that the hole effective mass can be effectively reduced. And it is reduced by about 90% in the structure of different crystal orientations.

Key words: valence band structure, stress, GaN/AlN quantum well, crystal orientations, k·p method

CLC Number: 

  • TN301
[1] IKEDA N, NIIYAMA Y, KAMABAYASHI H, et al. GaN power transistors on Si substrates for switching [J]. Proceedings of the IEEE, 2010, 98(7): 1151-1161.
[2] FLACK T J, PUSHPAKARAN B N, BAYNE S B. GaN technology for power electronic applications: a review [J]. Journal of Electronic Materials, 2016, 45(6): 2673-2682.
[3] ZHENG Z Y, ZHANG L, SONG W J, et al. Gallium nitride-based complementary logic integrated circuits [J]. Nature Electronics, 2021, 4: 595-603.
[4] SIRENKO Y M, JEON J B, KIM W K, et al. Envelope-function formalism for valence bands in wurtzite quantum wells [J]. Physical Review B, 1996, 53(4): 1997-2009.
[5] CHUANG S L, CHAO C S. Effective mass Hamiltonian for strained wurtzite GaN and analytical solutions [J]. Applied Physicas Letters, 1996, 68(12): 1657-1659.
[6] FRITSCH D, SCHMIDT H, GRUNDMANN M. Band-structure pseudopotential calculation of zinc-blende and wurtzite AlN, GaN, and InN [J]. Physical Review B, 2003, 67(23): 235205.
[7] AMBACHER O, SMART J, SHEALY J R, et al. Two-dimensional electron gases induced by spontaneous and piezoelectric polarization charges in N- and Ga-face AlGaN/GaN heterostructures [J]. Journal of Applied Physics, 1999, 85(6): 3222-3233.
[8] NOMOTO K, CHAUDHURI R, BADER S J, et al. GaN/AlN p-channel HEFTs with Imas>420 mA/mm and ~20 GHz fT/fMAX[C]//2020 IEEE International Electron Devices Meeting (IEDM) . San Francisco, CA, USA: IEEE, 2020.
[9] 聂玉虎. GaN材料应变沿表面法线分布信息的XRD测量方法研究[D]. 西安: 西安电子科技大学, 2014.
[10] SONG H, SUH J, KIM E K, et al. Growth of high quality a-plane GaN epi-layer on r-plane sapphire substrates with optimization of multi-buffer layer [J]. Journal of Crystal Growth, 2010, 312(21): 3122-3126.
[11] JUNG C, JANG J, HWANG J, et al. Defect reduction in (11-22) semipolar GaN with embedded InN islands on m-plane sapphire [J]. Journal of Crystal Growth, 2013, 370(5): 26-29.
[12] PONCE S, JENA D, GIUSTINO F. Route to high hole mobility in GaN via reversal of crystal-field splitting [J]. Physical Review Letters, 2019, 123(9): 096602.
[13] GUPTA C, TSUKADA Y, ROMANCZYK B, et al. First demonstration of improvement in hole conductivity in c-plane III-nitrides through application of uniaxial strain [J]. Japanese Journal of Applied Physics, 2019, 58(3): 030908.
[14] BADER S J, CHAUDHURI R, SCHUBERT M, et al. Wurtzite phonons and the mobility of a GaN/AlN 2D hole gas [J]. Applied Physics Letters, 2019, 114(25): 253501.
[15] CHUANG S L, CHANG C S. K·P method for strained wurtzite semiconductors [J]. Physical Review B, 1996, 54(4): 2491-2504.
[16] KANE E O. Band structure of indium antimonide [J]. Journal of Physics and Chemistry of Solids, 1957, 1(4): 249-261.
[17] BYKHOVSKI A, GELMONT B L, SHUR M S. Strain and charge distribution in GaN-AlN-GaN semiconductor-insulator-semiconductor structure for arbitrary growth orientation [J]. Applied Physics Letters, 1993, 63(16): 2243-2245.
[18] CALIN G. K·P theory of semiconductor nanostructures[D]. Worcester: Worcester Polytechnic Institute, 2005.
[19] BYKHOVSKI A, GELMONT B, SHUR M S, et al. Current-voltage characteristics of strained piezoelectric structures [J]. Journal of Applied Physics, 1995, 77(4): 1616-1620.
[20] CHAUDHURI R, BADER S J, CHEN Z, et al. A polarization-induced 2D hole gas in undoped gallium nitride quantum wells [J]. Science, 2019, 365(6460): 1454-1457.
[21] SMITH D L, MAILHIOT C. Piezoelectric effects in strained-layer superlattices [J]. Journal of Applied Physics, 1988, 63(8): 2717-2719.
[22] BASTARD G, MENDEZ E E, CHANG L L, et al. Variational calculations on a quantum well in an electric field [J]. Physical Review B, 1983, 28(6): 3241-3245.
[23] LIU Y, LI X, ZHANG G, et al. The calculation for quantized valence subband structure of zinc-blende GaN heterojunction quantum well based on k·p method [J]. Semiconductor Science and Technology, 2021, 36(12): 1-9.
[24] BREY L, DEMPSEY J, JOHNSON N F, et al. Infrared optical absorption in imperfect parabolic quantum wells [J]. Physical Review B, 1990, 42(2): 1240-1247.
[25] VURGAFTMAN I, MEYER J R, RAM-MOHAN L R. Band parameters for III-V compound semiconductors and their alloys [J]. Journal of Applied Physics, 2001, 89(11): 5815-5875.
[26] BYKHOVSKI A D, KAMINSKI V V, SHUR M S, et al. Piezoresistive effect in wurtzite n-type GaN [J]. Applied Physics Letters, 1996, 68(6): 818-819.
[27] SUZUKI M, UENOYAMA T, YANASE A. First-principles calculations of effective-mass parameters of AlN and GaN [J]. Physical Review B Condens Matter, 1995, 52(11): 8132-8139.
[28] WEBER O, IRISAWA T, NUMATA T, et al. Examination of additive mobility enhancements for uniaxial stress combined with biaxially strained Si, biaxially strained SiGe and Ge channel MOSFETs[C]//IEEE International Electron Devices Meeting. Washington, DC: IEEE, 2007.
[29] ADACHI S. Properties of group-IV, III-V and II-VI semiconductors[M]. New York: John Wiley & Sons Inc. , 2005: 114-115.
[30] SIRENKO Y M, JEON J B, KIM K W, et al. Strain effects on valence band structure in würtzite GaN quantum wells [J]. Applied Physics Letters, 1996, 69(17): 2504-2506.
[31] PARK S H. Many-body optical gain of ( $10 \bar{1}0 $ ) wurtzite GaN/AlGaN quantum-well lasers [J]. Applied Physics Letters, 2000, 77(25): 4095-4097.
[32] NIWA A, OHTOSHI T, KURODA T. Valence subband structures of ( $10 \bar{1} 0$ ) -GaN/AlGaN strained quantum wells calculated by the tight-binding method [J]. Applied Physics Letters, 1997, 70(16): 2159-2161.
[1] Wang Xiao-feng, He Xiao-qi, Yao Bin. Simulation and Verification of Warpage Deformation of PBGA Package Reflow Soldering [J]. Journal of Guangdong University of Technology, 2020, 37(02): 94-101.
[2] Zhou Ruo-yang, Yang Xue-qiang, Liu Pan, Zheng Li-ting, Chen Tao. A True Triaxial Test of Saturated Coarse Sand Under Different Loading Directions [J]. Journal of Guangdong University of Technology, 2020, 37(01): 58-64.
[3] Yu Zhi-tao, Pan Hao, He Shao-hua. Influence of Prestressed Axial Compression Ratio on Mechanical Properties of Segmental Bridge Piers [J]. Journal of Guangdong University of Technology, 2019, 36(04): 85-91.
[4] Wang Ya-wen, Gu Ai-yu, Yan Bai-ping, Luo Lang. Magneto-Magnetic Coupling Characteristics of Magnetostrictive Materials in Walking Energy Collector [J]. Journal of Guangdong University of Technology, 2018, 35(04): 25-31.
[5] MA Ping, LIAO Ming-yi, WANG Zhi-yong.  A Research on Mechanics and Fatigue Properties of Ropes Rowed Sling with Sockets Used in Crane [J]. Journal of Guangdong University of Technology, 2016, 33(05): 65-68.
[6] YANG Xue-Qiang, LIU Yong-Jian, JI Xiao-Ming. Calculation of Soil Arch Effect in View of Gravity Stress Field [J]. Journal of Guangdong University of Technology, 2016, 33(03): 76-80.
[7] Liu Kun, Peng Mei-chun, Lin Yi-qing, Wang Hai-long. Finite Element Analysis of Drum Brake Stamping-welding Shoes Based on ANSYS Workbench [J]. Journal of Guangdong University of Technology, 2013, 30(1): 92-96.
[8] Yin Ying-mei; Zhang Rong-hui . Design of Water Diversion and Drainage in Old Concrete Pavements [J]. Journal of Guangdong University of Technology, 2009, 26(1): 2-.
[9] Leng Wen-bing; Yuan Ge-cheng; Ni Xue-ming; Lu Hao-dong . Stress Corrosion Cracking Behavior of 5083 Aluminum Alloys in 3.5%NaCl Solution [J]. Journal of Guangdong University of Technology, 2009, 26(1): 7-.
[10] LIU Yong-jian,XIA Ji-jun . Application of Optimization Selection of Pile Driving System Based on Stress-wave Theory [J]. Journal of Guangdong University of Technology, 2007, 24(4): 83-88.
[11] REN Feng-ming,YUAN Bing. Analysis of Influence of Cushion on Stresses and Displacements of the Working Well [J]. Journal of Guangdong University of Technology, 2007, 24(1): 56-60.
[12] YANG Xue-qiang1,GONG Quan-mei2,LI Zhang-ming1. Physical Explanations for Three Types of Failure Criteria [J]. Journal of Guangdong University of Technology, 2007, 24(03): 76-83.
[13] SHI Hong-yan,BAI Lin. Non-coaxial Behavior of Soil under Plane Strain Conditions [J]. Journal of Guangdong University of Technology, 2007, 24(03): 84-87.
[14] TAN De-pan1,JIANG Hai-bo1,HE Bo-qing2,L Yan2. Research into the Deteriorations of Frame Arch Bridge Slabs with a Slightly Curved Bottom [J]. Journal of Guangdong University of Technology, 2007, 24(03): 88-91.
[15] LUO Zhi-qiang. Characteristic Analysis of Asphalt Covered Layer Building up Stress Adsorbed Course [J]. Journal of Guangdong University of Technology, 2007, 24(03): 92-95.
Viewed
Full text


Abstract

Cited

  Shared   
  Discussed   
No Suggested Reading articles found!