Research Progress on Control Strategies for Nonlinear Characteristics of Piezoelectric Actuators

Piezoelectric actuators have the advantages of high displacement resolution, compact size, rapid response, strong load-driving capability, the ability to provide multi-degree of freedom outputs, and immunity to electromagnetic interference etc, which are widely used in micro-nano processing, micro-electromechanical system packaging, bio-medicine, aerospace engineering and other fields. However, the nonlinear characteristics of piezoelectric actuators, such as hysteresis and creep, make affection for the stability and can cause unstable and inaccurate outputs, which requires certain appropriate control strategies to overcome the above problems. In this research, the nonlinear characteristics of piezoelectric actuators are firstly summarized.Secondly, research progress of hysteresis model and creep model is reviewed. Then, the compensation of control strategy and research progress of piezoelectric actuators are introduced. Finally, the trend of piezoelectric actuator future development in control technology is discussed and prospected.