基于弹性系统的金刚石表面研磨试验研究

广东工业大学学报 ›› 2005, Vol. 22 ›› Issue (1): 15-19.

基于弹性系统的金刚石表面研磨试验研究

广东工业大学机电工程学院；广东工业大学机电工程学院广东广州510090；广东广州510090；广东广州510090；

出版日期:2005-03-02 发布日期:2005-03-02
基金资助:
广东省自然科学基金资助项目(20010033);广州市科技计划项目(2 D2041)

Experimental Study on Polishing-like Grinding of Diamond Based on Elastic System

(Faculty of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510090,China)

Online:2005-03-02 Published:2005-03-02

摘要/Abstract

摘要： 提出一种基于弹性系统的金刚石研磨技术,并对该加工方法进行一系列的试验研究,试验结果表明该方法可获得高质量的金刚石表面.

关键词: 弹性系统:金刚石；研磨；

Abstract: A method of polishing-like grinding of diamond is introduced based on elastie system.A series of experiments are done and the results show that high quality diamond face can be got with this metod.

Key words: elastic system； diamond； polishing-like grinding；

姚强；傅惠南；王宏霞； . 基于弹性系统的金刚石表面研磨试验研究[J]. 广东工业大学学报, 2005, 22(1): 15-19.

YAO qiang,FU Hui-nan,WANG Hong-xia. Experimental Study on Polishing-like Grinding of Diamond Based on Elastic System[J]. Journal of Guangdong University of Technology, 2005, 22(1): 15-19.

参考文献

[1] 黄文浩,张竟敏,阎立峰,陈宇航,褚家如. 原子力显微镜在金刚石表面微结构分析中的应用[J]. 电子显微学报. 2001(05)

[2] 戴一帆,李圣怡. 超精密加工精度分析[J]. 中国机械工程. 1999(02)

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[1] I. Zarudi,L. Zhang. Subsurface damage in single-crystal silicon due to grinding and polishing[J] ,1996

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