拓扑简洁的DBD准分子灯高频高压双极性脉冲电源的研究与实现

    Research and Implementation of a High-frequency High-voltage Bipolar Pulse Power Supply with Simplified Structure for DBD Excimer Lamps

    • 摘要: 针对现有介质阻挡放电(Dielectric Barrier Discharge, DBD)脉冲电源结构复杂、难以高效地生成双极性高频脉冲激励的关键问题,本文提出一种结构简单的高频双极性脉冲拓扑。该电源仅由1个直流电源、2个电感、2个电容、2个功率开关器件及1个高频升压变压器构成。以DBD型准分子灯为负载开展实验研究,结果表明:该电源可在负载两端输出稳定且上升沿陡峭的双极性脉冲电压;通过调节频率与输入电压,可实现对放电功率的调控。此外,该电源实现了功率器件的软开关运行。对比实验证实:在同等负载电压峰峰值下,其驱动的准分子灯光照强度分别是单极性脉冲电源与串联谐振型电源的3.5倍和5倍;在同等输入功率条件下,光照强度则分别达到前述两者的2.2倍和2.3倍。本研究为DBD负载的高效激励提供了一种紧凑、高效的电源解决方案。

       

      Abstract: To simplify the pulse power supply for dielectric barrier discharge (DBD) loads, a compact high-frequency bipolar topology is proposed. The circuit integrates only one DC source, two inductors, two capacitors, two switches, and one transformer. Experimental results with a DBD excimer lamp demonstrate stable bipolar outputs with steep rising edges and soft-switching operation. Discharge power is controllable via frequency and voltage modulation. Comparative tests demonstrate that under identical peak-to-peak voltage, the lamp’s luminous intensity is 3.5 and 5 times that of unipolar and series resonant supplies, respectively. Under identical input power, the intensity reaches 2.2 and 2.3 times the counterparts. This study offers a highly efficient, compact excitation solution for DBD applications.

       

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