广东工业大学学报 ›› 2018, Vol. 35 ›› Issue (06): 18-23,30.doi: 10.12052/gdutxb.180075

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氮化硅陶瓷球研磨抛光技术研究进展

肖晓兰1, 阎秋生1, 林华泰1, 焦竞豪1, 刘杰1,2   

  1. 1. 广东工业大学 机电工程学院, 广东 广州 510006;
    2. 广州番禺职业技术学院 机电工程学院, 广东 广州 511483
  • 收稿日期:2018-04-28 出版日期:2018-11-23 发布日期:2018-09-18
  • 通信作者: 阎秋生(1962-),男,教授,博士,博士生导师,主要研究方向为磨削加工和微细加工技术、精密分切加工.E-mail:qsyan@gdut.edu.cn E-mail:qsyan@gdut.edu.cn
  • 作者简介:肖晓兰(1979-),女,实验师,博士研究生,主要研究方向为机械设计与精密加工.
  • 基金资助:
    国家自然科学基金资助项目（51375097）；广东省自然科学基金资助重点项目（2015A030311044）；广东省科技计划项目（2016A010102014）

Research Progress of Silicon Nitride Ceramic Ball Grinding and Polishing Technology

Xiao Xiao-lan1, Yan Qiu-sheng1, Lin Hua-tai1, Jiao Jing-hao1, Liu Jie1,2   

  1. 1. School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China;
    2. School of Mechanical and Electrical Engineering, Panyu Vocational and Technical College, Guangzhou 511483, China
  • Received:2018-04-28 Online:2018-11-23 Published:2018-09-18

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摘要： 氮化硅陶瓷球是重大装备中轴承的关键基础元件，球体的超精密研磨抛光质量是影响轴承性能与寿命的重要因素. 本文从加工方法的角度，总结了陶瓷球研磨抛光技术的研究进展，对不同的陶瓷球超精密复合抛光方法进行了比较分析，并提出了一种新型抛光方法，即集群磁流变抛光陶瓷球的方法. 该方法初步测试显示，经3 h的抛光，氮化硅陶瓷球的表面粗糙度Ra由50 nm下降到5 nm，球度达到0.11~0.22 μm.

关键词: 氮化硅陶瓷球, 研磨, 复合加工, 集群磁流变, 抛光

Abstract: Silicon nitride ceramic ball is the key element of bearings in heavy equipment, and the ultra-precision grinding and polishing quality of the balls is an important factor affecting the bearing performance and life. From the angle of the processing method, the research progress of ceramic ball grinding and polishing technology is summarized. The method of ultra-precision compound polishing for different silicon nitride ceramic balls is compared and analyzed. A new method of grinding and polishing, that is, the method of cluster magnetorheological polishing, is put forward. Preliminary tests show that by the method of 3 hours of polishing, silicon nitride ceramic ball surface roughness Ra can reach 5 nm, and sphericity is 0.11 to 0.22 μm.

Key words: silicon nitride ceramic ball, grinding, composite processing, clustered magnetorheological, polishing

中图分类号: 

  • TH709
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