Journal of Guangdong University of Technology ›› 1999, Vol. 16 ›› Issue (3): 89-94.

• Comprehensive Studies • Previous Articles     Next Articles

SOI Technology and the Latest Develop ment in It

  

  1. ( 1 . Guangdong Agricultural, Industrialand Com mercial Administration College, Guangzhou 510507 , China ;2 . Dept.of Mathematics and Physics, G D U T, Guangzhou 510090 , China)
  • Online:1999-10-02 Published:1999-10-02

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[1] 罗南林,杨春晖,刘百勇.  横向固相外延生长及其影响因素的研究[J]. 半导体技术. 1998(05)

[2] 范缇文,袁俊,L.M.Brown.  氮离子注入形成的SOI结构的研究[J]. 半导体学报. 1988(05)

[3] 闵靖.  形成SIMOX结构的PIII新技术的研究[J]. 半导体学报. 1995(08)

[4] 粟根克昶,揭庆应.  三维器件和SOI技术[J]. 微电子学. 1986(01)

[1] Lasky J B.Wafer bonding for silicon - on - insulator technologies. Appl. Phys . Lett . 1986

[2] Raha Prasun,Miller James W,Elyse Rosenbaum.Time Dependent Snapbackin Thin Film S O I M O S F E T’s. I E E E E L E C T R O N D E V I C E L E T T E R S . 1997

[3] Bruel M.Silicon on insulator materialtechnology. Electronics Lett . 1995

[4] Raineri V,Campisano S V.Silicon - on - insulator produced by helium implantation and thermaloxidation. Applied Physics Letters . 1995

[5] Lin K C,Holland O W,Feldman L C,et al.Surface characterization of silicon on insulator material. Applied Physics Letters . 1998

[6] Chuang Chingte,Lu Pongfei,Carl J. Anderson,et al.S O Ifor Digital C M O S V L S I: Design Considerations andadvance. P R O C E E D I N G Sof T H E I E E E . 1998

[7] Yamada A.S O Iby wafer bonding with spin - on - glass as adhesive. Electronics Lett . 1987

[8] Lin T L.New silicon - on - insulator technology using a two - step oxidation technique. Applied Physics Letters . 1986

[9] Akimov A G,Barabanenkov M Yu,Mordkovich V N.Pore formation on the silicon - metalinterface in silicon- on - insulator structures. Journal of Applied Physics . 1998

[10] Jenkins Keith A,Sun J Y C,Gantier J.Characteristics of S O I F E T’s Under Pulsed Conditions. I E E E T R A N S A C T I O N O N E L E C T R O N D E V I C E S . 1997
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