Journal of Guangdong University of Technology ›› 2005, Vol. 22 ›› Issue (2): 31-36.

• Comprehensive Studies • Previous Articles     Next Articles

Application and Research Development of TiN Coating

  

  1. (Faculty of Material and Energy, Guangdong University of Technology, Guangzhou 510643, China)
  • Online:2005-06-01 Published:2005-06-01

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Abstract: Recent applications of TiN coating are summarized in this paper. Effect of ternary element addition on its properties is presented. The behaviors of multilayer coatings including TiN film are introduced. The future development trend of TiN coating is expected.

Key words: TiN coating； multi-element coating； multilayer coating； wear resistance；

[1] KnotekO,,SchreyA.HandbookofThinFilmProcessTechnology. . 1995

[2] Knotek O,Loffler F,Schrey A,et al.Corrosion resistance of TiN coating. Surface Modification Technology . 1992

[3] Rha S K,Lee W J,Lee S Y,et al.Correlation between microstructure and barrier properties of TiN thin films used Cu interconnects. Materials Research Bulletin . 1992

[4] Lii D F.High temperature wear behaviour of ion plating TiN coating. Journal of Materials Science . 1998

[5] Shew B Y,Huang J L,Lii D F.Oxidation behavior of TiAlN film prepared by ion beam-assisted deposition. Journal of the American Ceramic Society . 1999

[6] Tanaka Y,Gur T M,Kelly M,et al.Barrier behavior of TiAlN film. Thin Solid films . 1993

[7] Petrov I,Mojab E,Adibi F,et al.TiAlN film as a diffusion barrier between copper and silicon. Journal of Vacuum Science and Technology . 1993

[8] Lii D F,Huang W K,Tsai WT,et al.Investigation of Ti1-xAlxN films as diffusion barrier between Cu and Si. Surface Engineering . 2001

[9] Mclntyre D,Greene J E,Hakanssen G,et al.Deposition and characterization of (Ti, Al)N coatings using unbalanced magnetron sputtering. Applied Physics . 1990

[10] Ghosh S K,Kohler M S.Mechanical and tribological properties of Ti(C, N) coatings. Surface and Coatings Technology . 1992

[11] Su Y L,Kao WH.Optimum multilayer TiN-TiCN coatings for wear resistance and actual application. Wear . 1998

[12] Tanaka Y,Ichimiya N,Onishi Y,et al.Structure and properties of Al-Ti-Si-N coatings prepared by the cathodic arc ion plating method for high speed cutting applications. Surface and Coatings Technology . 2001

[13] Zhang W H,Hsieh J H.Tribological behavior of TiN and CrN coatings sliding against an epoxy molding compound. Surface and Coatings Technology . 2000

[14] Massiani Y,Gravier P,Marchetti F.Corrosion behaviour in acid solution of (Ti, Cr)Nx films deposited on glass. Thins Solid Films . 1995

[15] Veprek S.Nanocrystalline TiBN and related compounds. Journal of Vacuum Science and Technology . 1999

[16] Musil J.Hard and superhard nanocomposite coatings. Surface and Coatings Technology . 2000

[17] Otani Y,Hofmann S.High temperature oxidation behaviour of (Ti1-xCrx)N coatings. Thin Solid films . 1996

[18] Wiedemann R,Weihnacht V,Oettel H.Structure and mechanical properties of amorphous Ti-B-N coatings. Surface and Coatings Technology . 1999

[19] Heau L,Terrat J P.Ultrahard Ti-B-N coatings obtained by reactive magnetron sputtering of a Ti-B target. Surface and Coatings Technology . 1998

[20] Mitterer C,Losbichler P,Hofer F,et al.Nanocrystalline hard coatings within the quasi-binary system TiN-TiB2. Vacuum . 1998

[21] Nesladek P,Veprek S.Nanoscale TiBN films deposited by plasma enhanced chemical vapor deposition. Physica Status Solidi . 2000

[22] Pierson J F,Bertran F,Bauer J P,et al.Structure and electrical properties of sputtered titanium boronitride films. Surface and Coatings Technology . 2001

[23] Polonsky I A,Chang T P,Keer L M,et al.An analysis of the effect of hard coatings on near-surface rolling contact fatigue initiation induced by surface roughness. Wear . 1997

[24] Polonsky I A,Chang T P,Keer L M,et al.A study of rolling-contact fatigue of bearing steel coated with physical vapor deposition TiN films: coating response to cyclic contact stress and physical mechanisms underlying coating effect on the fatigue life. Wear . 1998

[25] Lacerda M M,Chen Y H,Zhou B,et al.The microstructure and mechanical properties of TaN/TiN and TaWN/TiN. Journal of Vacuum Science and Technology . 1999

[26] Chen Y H,Lee K W,Chiou W A,et al.Synthesis and structure of smooth superhard TiN/SiNx multilayer coatings with an equiaxed microstructure. Surface and Coatings Technology . 2001

[27] Hsieh J H,Zhang W H,Li C,et al.Characterization of (Tix Cr0. 6-x )N0. 4 coatings and their tribological behaviors against an epoxy molding compound. Surface and Coatings Technology . 2001
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