Journal of Guangdong University of Technology ›› 2007, Vol. 24 ›› Issue (2): 33-35.

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Design of the Illumination System for Laser Projection Lithography

  

  1.  (Faculty of Physics and Opto-electronic Engineering,Guangdong University of Technology,Guangzhou 510006,China)
  • Online:2007-07-02 Published:2007-07-02

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Abstract: For the laser projection lithography system used for the production of large-area,high processing throughput,and cost-effective printed circuit boards(PCB),its illumination system is simulation-designed and optimized using ZEMAX optical design software,and the optimized results are analyzed.The designed results,including uniform of image plane,size and shape of beam geometry,aberration as well as matching of illumination system with projection lens,fulfill the demands of laser illumination syste...

Key words: printed circuit board(PCB)； laser projection lithography； illumination system；

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