氮化硅陶瓷球研磨抛光技术研究进展

doi:10.12052/gdutxb.180075

Abstract

Abstract: Silicon nitride ceramic ball is the key element of bearings in heavy equipment, and the ultra-precision grinding and polishing quality of the balls is an important factor affecting the bearing performance and life. From the angle of the processing method, the research progress of ceramic ball grinding and polishing technology is summarized. The method of ultra-precision compound polishing for different silicon nitride ceramic balls is compared and analyzed. A new method of grinding and polishing, that is, the method of cluster magnetorheological polishing, is put forward. Preliminary tests show that by the method of 3 hours of polishing, silicon nitride ceramic ball surface roughness Ra can reach 5 nm, and sphericity is 0.11 to 0.22 μm.

Key words: silicon nitride ceramic ball, grinding, composite processing, clustered magnetorheological, polishing

CLC Number:

TH709

Xiao Xiao-lan, Yan Qiu-sheng, Lin Hua-tai, Jiao Jing-hao, Liu Jie. Research Progress of Silicon Nitride Ceramic Ball Grinding and Polishing Technology[J].Journal of Guangdong University of Technology, 2018, 35(06): 18-23,30.

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