Progress of High Power Impulse Magnetron Sputtering for Deposition of Hard Coatings
WANG Qi-Min, ZHANG Xiao-Bo, ZHANG Shi-Hong, WANG Cheng-Yong, WU Shang-Hua
Journal of Guangdong University of Technology . 2013, (4): 1 -13 .  DOI: 10.3969/j.issn.1007-7162.2013.04.001

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